Inventor
VINK HENRI JOHANNES PETRUS
NL11 patents
⚠️ This page may combine multiple inventors who share the name “VINK HENRI JOHANNES PETRUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS7948606B2May 24, 2011
Moving beam with respect to diffractive optics in order to reduce interference patterns
ASML NETHERLANDS BV5 citations62
US7342644B2Mar 11, 2008
Methods and systems for lithographic beam generation
ASML NETHERLANDS BV4 citations62
US7330239B2Feb 12, 2008
Lithographic apparatus and device manufacturing method utilizing a blazing portion of a contrast device
ASML NETHERLANDS BV3 citations62
US7079225B2Jul 18, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations62
US7898646B2Mar 1, 2011
Using an interferometer as a high speed variable attenuator
ASML NETHERLANDS BV3 citations61
US7714986B2May 11, 2010
Laser beam conditioning system comprising multiple optical paths allowing for dose control
ASML NETHERLANDS BV2 citations61
US7738079B2Jun 15, 2010
Radiation beam pulse trimming
ASML NETHERLANDS BV0 citations51
US7826037B2Nov 2, 2010
Radiation beam pulse trimming
ASML NETHERLANDS BV0 citations46