Inventor
ZHAO JUN
DE445 patents
⚠️ This page may combine multiple inventors who share the name “ZHAO JUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
35 patentsUS6179924B1Jan 30, 2001
Heater for use in substrate processing apparatus to deposit tungsten
APPLIED MATERIALS INC324 citations99
US6129044AOct 10, 2000
Apparatus for substrate processing with improved throughput and yield
APPLIED MATERIALS INC578 citations99
US6099651AAug 8, 2000
Temperature controlled chamber liner
APPLIED MATERIALS INC360 citations99
US6056823AMay 2, 2000
Temperature controlled gas feedthrough
APPLIED MATERIALS INC167 citations99
US6035101AMar 7, 2000
High temperature multi-layered alloy heater assembly and related methods
APPLIED MATERIALS INC963 citations99
US5951776ASep 14, 1999
Self aligning lift mechanism
APPLIED MATERIALS INC273 citations99
US5882411AMar 16, 1999
Faceplate thermal choke in a CVD plasma reactor
APPLIED MATERIALS INC227 citations99
US5846332ADec 8, 1998
Thermally floating pedestal collar in a chemical vapor deposition chamber
APPLIED MATERIALS INC863 citations99
US6258170B1Jul 10, 2001
Vaporization and deposition apparatus
APPLIED MATERIALS INC307 citations98
US6210485B1Apr 3, 2001
Chemical vapor deposition vaporizer
APPLIED MATERIALS INC450 citations98
US6189482B1Feb 20, 2001
High temperature, high flow rate chemical vapor deposition apparatus and related methods
APPLIED MATERIALS INC447 citations98
US6120609ASep 19, 2000
Self-aligning lift mechanism
APPLIED MATERIALS INC104 citations98
US6051286AApr 18, 2000
High temperature, high deposition rate process and apparatus for depositing titanium layers
APPLIED MATERIALS INC170 citations98
US5993916ANov 30, 1999
Method for substrate processing with improved throughput and yield
APPLIED MATERIALS INC311 citations98
US5983906ANov 16, 1999
Methods and apparatus for a cleaning process in a high temperature, corrosive, plasma environment
APPLIED MATERIALS INC153 citations98
US5968379AOct 19, 1999
High temperature ceramic heater assembly with RF capability and related methods
APPLIED MATERIALS INC262 citations98
US5964947AOct 12, 1999
Removable pumping channel liners within a chemical vapor deposition chamber
APPLIED MATERIALS INC96 citations98
US5885356AMar 23, 1999
Method of reducing residue accumulation in CVD chamber using ceramic lining
APPLIED MATERIALS INC154 citations98
US5558717ASep 24, 1996
CVD Processing chamber
APPLIED MATERIALS INC1,163 citations98
US6773507B2Aug 10, 2004
Apparatus and method for fast-cycle atomic layer deposition
APPLIED MATERIALS INC124 citations97
US6527865B1Mar 4, 2003
Temperature controlled gas feedthrough
APPLIED MATERIALS INC89 citations97
US6464795B1Oct 15, 2002
Substrate support member for a processing chamber
APPLIED MATERIALS INC98 citations97
US6066209AMay 23, 2000
Cold trap
APPLIED MATERIALS INC80 citations97
US6936551B2Aug 30, 2005
Methods and apparatus for E-beam treatment used to fabricate integrated circuit devices
APPLIED MATERIALS INC52 citations96
US6693050B1Feb 17, 2004
Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques
APPLIED MATERIALS INC56 citations96
US6616767B2Sep 9, 2003
High temperature ceramic heater assembly with RF capability
APPLIED MATERIALS INC114 citations96
US6270859B2Aug 7, 2001
Plasma treatment of titanium nitride formed by chemical vapor deposition
APPLIED MATERIALS INC42 citations96
US6165271ADec 26, 2000
Temperature controlled process and chamber lid
APPLIED MATERIALS INC49 citations96
US6096134AAug 1, 2000
Liquid delivery system
APPLIED MATERIALS INC23 citations96
US6082714AJul 4, 2000
Vaporization apparatus and process
APPLIED MATERIALS INC32 citations96
US6063199AMay 16, 2000
Temperature controlled liner
APPLIED MATERIALS INC23 citations96
US5853607ADec 29, 1998
CVD processing chamber
APPLIED MATERIALS INC91 citations96
US6440495B1Aug 27, 2002
Chemical vapor deposition of ruthenium films for metal electrode applications
APPLIED MATERIALS INC136 citations95
US5994678ANov 30, 1999
Apparatus for ceramic pedestal and metal shaft assembly
APPLIED MATERIALS INC89 citations95
US5643364AJul 1, 1997
Plasma chamber with fixed RF matching
APPLIED MATERIALS INC167 citations95
LI PENG
5 patentsUS9073936B2Jul 7, 2015
Organic compounds
LI PENG38 citations98
US8664207B2Mar 4, 2014
Organic compounds
LI PENG99 citations98
US8697710B2Apr 15, 2014
Optionally substituted 3-amino-4-(thioxo or imino)-4,5-dihydro-2H-pyrazolo [3,4-d]pyrimidin-6(7H)-ones
LI PENG96 citations97
US8633180B2Jan 21, 2014
Organic compounds
LI PENG97 citations97
US8536159B2Sep 17, 2013
Organic compounds
LI PENG98 citations97
UNIV DALIAN TECH
2 patentsATHENA NEUROSCIENCES INC
2 patentsAPEL THOMAS R
1 patentZHEJIANG CFMOTO POWER CO LTD
1 patentCHUNFENG HOLDING GROUP HANGZHO
1 patentMICROSOFT CORP
1 patentDU PONT
1 patentCANON KK
1 patentShowing the top 50 of 445 patents by PatentIndex Score.