P

Inventor

ZHAO JUN

DE445 patents
⚠️ This page may combine multiple inventors who share the name “ZHAO JUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

35 patents
US6179924B1Jan 30, 2001

Heater for use in substrate processing apparatus to deposit tungsten

APPLIED MATERIALS INC324 citations99
US6129044AOct 10, 2000

Apparatus for substrate processing with improved throughput and yield

APPLIED MATERIALS INC578 citations99
US6099651AAug 8, 2000

Temperature controlled chamber liner

APPLIED MATERIALS INC360 citations99
US6056823AMay 2, 2000

Temperature controlled gas feedthrough

APPLIED MATERIALS INC167 citations99
US6035101AMar 7, 2000

High temperature multi-layered alloy heater assembly and related methods

APPLIED MATERIALS INC963 citations99
US5951776ASep 14, 1999

Self aligning lift mechanism

APPLIED MATERIALS INC273 citations99
US5882411AMar 16, 1999

Faceplate thermal choke in a CVD plasma reactor

APPLIED MATERIALS INC227 citations99
US5846332ADec 8, 1998

Thermally floating pedestal collar in a chemical vapor deposition chamber

APPLIED MATERIALS INC863 citations99
US6258170B1Jul 10, 2001

Vaporization and deposition apparatus

APPLIED MATERIALS INC307 citations98
US6210485B1Apr 3, 2001

Chemical vapor deposition vaporizer

APPLIED MATERIALS INC450 citations98
US6189482B1Feb 20, 2001

High temperature, high flow rate chemical vapor deposition apparatus and related methods

APPLIED MATERIALS INC447 citations98
US6120609ASep 19, 2000

Self-aligning lift mechanism

APPLIED MATERIALS INC104 citations98
US6051286AApr 18, 2000

High temperature, high deposition rate process and apparatus for depositing titanium layers

APPLIED MATERIALS INC170 citations98
US5993916ANov 30, 1999

Method for substrate processing with improved throughput and yield

APPLIED MATERIALS INC311 citations98
US5983906ANov 16, 1999

Methods and apparatus for a cleaning process in a high temperature, corrosive, plasma environment

APPLIED MATERIALS INC153 citations98
US5968379AOct 19, 1999

High temperature ceramic heater assembly with RF capability and related methods

APPLIED MATERIALS INC262 citations98
US5964947AOct 12, 1999

Removable pumping channel liners within a chemical vapor deposition chamber

APPLIED MATERIALS INC96 citations98
US5885356AMar 23, 1999

Method of reducing residue accumulation in CVD chamber using ceramic lining

APPLIED MATERIALS INC154 citations98
US5558717ASep 24, 1996

CVD Processing chamber

APPLIED MATERIALS INC1,163 citations98
US6773507B2Aug 10, 2004

Apparatus and method for fast-cycle atomic layer deposition

APPLIED MATERIALS INC124 citations97
US6527865B1Mar 4, 2003

Temperature controlled gas feedthrough

APPLIED MATERIALS INC89 citations97
US6464795B1Oct 15, 2002

Substrate support member for a processing chamber

APPLIED MATERIALS INC98 citations97
US6066209AMay 23, 2000

Cold trap

APPLIED MATERIALS INC80 citations97
US6936551B2Aug 30, 2005

Methods and apparatus for E-beam treatment used to fabricate integrated circuit devices

APPLIED MATERIALS INC52 citations96
US6693050B1Feb 17, 2004

Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques

APPLIED MATERIALS INC56 citations96
US6616767B2Sep 9, 2003

High temperature ceramic heater assembly with RF capability

APPLIED MATERIALS INC114 citations96
US6270859B2Aug 7, 2001

Plasma treatment of titanium nitride formed by chemical vapor deposition

APPLIED MATERIALS INC42 citations96
US6165271ADec 26, 2000

Temperature controlled process and chamber lid

APPLIED MATERIALS INC49 citations96
US6096134AAug 1, 2000

Liquid delivery system

APPLIED MATERIALS INC23 citations96
US6082714AJul 4, 2000

Vaporization apparatus and process

APPLIED MATERIALS INC32 citations96
US6063199AMay 16, 2000

Temperature controlled liner

APPLIED MATERIALS INC23 citations96
US5853607ADec 29, 1998

CVD processing chamber

APPLIED MATERIALS INC91 citations96
US6440495B1Aug 27, 2002

Chemical vapor deposition of ruthenium films for metal electrode applications

APPLIED MATERIALS INC136 citations95
US5994678ANov 30, 1999

Apparatus for ceramic pedestal and metal shaft assembly

APPLIED MATERIALS INC89 citations95
US5643364AJul 1, 1997

Plasma chamber with fixed RF matching

APPLIED MATERIALS INC167 citations95

LI PENG

5 patents

UNIV DALIAN TECH

2 patents

ATHENA NEUROSCIENCES INC

2 patents

APEL THOMAS R

1 patent

ZHEJIANG CFMOTO POWER CO LTD

1 patent

CHUNFENG HOLDING GROUP HANGZHO

1 patent

MICROSOFT CORP

1 patent

DU PONT

1 patent

CANON KK

1 patent

Showing the top 50 of 445 patents by PatentIndex Score.