P

Inventor

GRIFFIN KEVIN

US47 patents
⚠️ This page may combine multiple inventors who share the name “GRIFFIN KEVIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

33 patents
US9765434B2Sep 19, 2017

Apparatus for susceptor temperature verification and methods of use

APPLIED MATERIALS INC2 citations73
US11430680B2Aug 30, 2022

Position and temperature monitoring of ALD platen susceptor

APPLIED MATERIALS INC2 citations72
US11230763B2Jan 25, 2022

Gas separation control in spatial atomic layer deposition

APPLIED MATERIALS INC2 citations72
US10570511B2Feb 25, 2020

Gas separation control in spatial atomic layer deposition

APPLIED MATERIALS INC2 citations72
US10312120B2Jun 4, 2019

Position and temperature monitoring of ALD platen susceptor

APPLIED MATERIALS INC4 citations72
US10196741B2Feb 5, 2019

Wafer placement and gap control optimization through in situ feedback

APPLIED MATERIALS INC3 citations72
US9721757B2Aug 1, 2017

Elongated capacitively coupled plasma source for high temperature low pressure environments

APPLIED MATERIALS INC3 citations72
US11174553B2Nov 16, 2021

Gas distribution assembly for improved pump-purge and precursor delivery

APPLIED MATERIALS INC3 citations71
US10197385B2Feb 5, 2019

Intelligent hardstop for gap detection and control mechanism

APPLIED MATERIALS INC3 citations71
US11332828B2May 17, 2022

Gas distribution assembly mounting for fragile plates to prevent breakage

APPLIED MATERIALS INC2 citations69
US12584219B2Mar 24, 2026

Methods for controlling pulse shape in ALD processes

APPLIED MATERIALS INC0 citations62
US12340980B2Jun 24, 2025

Plasma showerhead with improved uniformity

APPLIED MATERIALS INC0 citations62
US11887856B2Jan 30, 2024

Enhanced spatial ALD of metals through controlled precursor mixing

APPLIED MATERIALS INC0 citations62
US11821083B2Nov 21, 2023

Gas separation control in spatial atomic layer deposition

APPLIED MATERIALS INC0 citations62
US11761083B2Sep 19, 2023

Methods for controlling a flow pulse shape

APPLIED MATERIALS INC0 citations62
US11713508B2Aug 1, 2023

Apparatus and methods for improving chemical utilization rate in deposition process

APPLIED MATERIALS INC0 citations62
US11586789B2Feb 21, 2023

Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformity

APPLIED MATERIALS INC1 citations62
US11530480B2Dec 20, 2022

Injector for batch processing and methods of use

APPLIED MATERIALS INC0 citations62
US11396703B2Jul 26, 2022

Apparatus and methods for improving chemical utilization rate in deposition process

APPLIED MATERIALS INC0 citations62
US11261525B2Mar 1, 2022

Injector for batch processing and methods of use

APPLIED MATERIALS INC0 citations62
US11043386B2Jun 22, 2021

Enhanced spatial ALD of metals through controlled precursor mixing

APPLIED MATERIALS INC1 citations62
US10900125B2Jan 26, 2021

Apparatus for susceptor temperature verification and methods of use

APPLIED MATERIALS INC0 citations62
US11584992B2Feb 21, 2023

Gas distribution assembly for improved pump-purge and precursor delivery

APPLIED MATERIALS INC0 citations61
US10273578B2Apr 30, 2019

Top lamp module for carousel deposition chamber

APPLIED MATERIALS INC1 citations61
US7921803B2Apr 12, 2011

Chamber components with increased pyrometry visibility

APPLIED MATERIALS INC5 citations60
US11577946B2Feb 14, 2023

Fail-safe pneumatic lift system

APPLIED MATERIALS INC0 citations55
US10508340B2Dec 17, 2019

Atmospheric lid with rigid plate for carousel processing chambers

APPLIED MATERIALS INC0 citations52
US12408239B2Sep 2, 2025

PBN heaters for ALD temperature uniformity

APPLIED MATERIALS INC0 citations51
US11976363B2May 7, 2024

Purge ring for pedestal assembly

APPLIED MATERIALS INC0 citations51
US9663859B2May 30, 2017

Intelligent hardstop for gap detection and control mechanism

APPLIED MATERIALS INC0 citations51
US12580159B2Mar 17, 2026

Plasma showerhead assembly and method of reducing defects

APPLIED MATERIALS INC0 citations49
US12442080B2Oct 14, 2025

Plasma showerhead assembly and method of reducing defects

APPLIED MATERIALS INC0 citations47
US12084771B2Sep 10, 2024

Control of liquid delivery in auto-refill systems

APPLIED MATERIALS INC0 citations41

GRIFFIN KEVIN

8 patents

TC1 LLC

4 patents

YUDOVSKY JOSEPH

1 patent

FORSTER JOHN C

1 patent