Inventor

IWADE KENJI

JP9 patents

⚠️ This page may combine multiple inventors who share the name “IWADE KENJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

3 patents

US8748289B2Jun 10, 2014

Method for manufacturing semiconductor device

EBARA CORP5 citations73

US7883394B2Feb 8, 2011

Substrate holding mechanism, substrate polishing apparatus and substrate polishing method

EBARA CORP5 citations73

US7419420B2Sep 2, 2008

Substrate holding mechanism, substrate polishing apparatus and substrate polishing method

EBARA CORP5 citations73

NAKANISHI MASAYUKI

2 patents

US8641480B2Feb 4, 2014

Polishing apparatus and polishing method

NAKANISHI MASAYUKI10 citations83

US8445360B2May 21, 2013

Method for manufacturing semiconductor device

NAKANISHI MASAYUKI5 citations83

ABE TAICHI

1 patent

US8492276B2Jul 23, 2013

Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method

ABE TAICHI8 citations76

TOGAWA TETSUJI

1 patent

US8292694B2Oct 23, 2012

Substrate holding mechanism, substrate polishing apparatus and substrate polishing method

TOGAWA TETSUJI4 citations60

TOSHIBA MEMORY CORP

1 patent

US10121677B2Nov 6, 2018

Manufacturing method of semiconductor device

TOSHIBA MEMORY CORP1 citations51

TOSHIBA KK

1 patent

US9558961B2Jan 31, 2017

Manufacturing method of semiconductor device

TOSHIBA KK0 citations51