Inventor
KUBOTA TAKEO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “KUBOTA TAKEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
10 patentsUS7014529B1Mar 21, 2006
Substrate processing method and substrate processing apparatus
TOSHIBA KK26 citations92
US6429134B1Aug 6, 2002
Method of manufacturing semiconductor device
TOSHIBA KK33 citations92
US7744445B2Jun 29, 2010
Polishing apparatus and polishing method
TOSHIBA KK26 citations90
US7638439B2Dec 29, 2009
Peripheral processing method and method of manufacturing a semiconductor device
TOSHIBA KK12 citations82
US6743645B2Jun 1, 2004
Method of inspecting process for manufacturing semiconductor device and method of manufacturing semiconductor device
TOSHIBA KK11 citations73
US7354861B1Apr 8, 2008
Polishing method and polishing liquid
TOSHIBA KK3 citations62
US6984532B2Jan 10, 2006
Method of judging residual film by optical measurement
TOSHIBA KK3 citations62
US7888139B2Feb 15, 2011
Fabricating method of nonvolatile semiconductor storage apparatus
TOSHIBA KK0 citations52
US7172492B2Feb 6, 2007
Polishing method and polishing system
TOSHIBA KK0 citations51
US10777424B2Sep 15, 2020
Method for manufacturing semiconductor device
TOSHIBA KK0 citations40