Inventor
KUISMA HEIKKI
FI47 patents
⚠️ This page may combine multiple inventors who share the name “KUISMA HEIKKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MURATA MANUFACTURING CO
27 patentsUS9829405B2Nov 28, 2017
Micromechanical pressure sensor structure having a side wall layer
MURATA MANUFACTURING CO9 citations84
US9541464B2Jan 10, 2017
Pressure sensor structure
MURATA MANUFACTURING CO3 citations73
US9442032B2Sep 13, 2016
Microelectromechanical pressure sensor with robust diaphragm
MURATA MANUFACTURING CO5 citations73
US11280610B2Mar 22, 2022
Piezoelectric z-axis gyroscope
MURATA MANUFACTURING CO1 citations62
US11105630B2Aug 31, 2021
Vibration-robust multiaxis gyroscope
MURATA MANUFACTURING CO1 citations62
US10910549B2Feb 2, 2021
Piezoelectric rotational MEMS resonator
MURATA MANUFACTURING CO0 citations62
US10782130B2Sep 22, 2020
Concatenated suspension in a piezoelectric gyroscope
MURATA MANUFACTURING CO1 citations62
US10418962B2Sep 17, 2019
System and method for resonator amplitude control
MURATA MANUFACTURING CO1 citations62
US11920931B2Mar 5, 2024
Gyroscope with self-test
MURATA MANUFACTURING CO0 citations52
US11617542B2Apr 4, 2023
Electrical interconnection for a catheter
MURATA MANUFACTURING CO0 citations52
US11415416B2Aug 16, 2022
Vibration-robust multiaxis gyroscope
MURATA MANUFACTURING CO0 citations52
US11320266B2May 3, 2022
Gyroscope with locked secondary oscillation frequency
MURATA MANUFACTURING CO0 citations52
US11248977B2Feb 15, 2022
Method and apparatus for cancelling interconnection capacitance
MURATA MANUFACTURING CO0 citations52
US11215455B2Jan 4, 2022
Piezoelectric ring gyroscope
MURATA MANUFACTURING CO0 citations52
US11137251B2Oct 5, 2021
Piezoelectric ring gyroscope
MURATA MANUFACTURING CO0 citations52
US11085768B2Aug 10, 2021
Synchronization structure for gyroscope
MURATA MANUFACTURING CO0 citations52
US11022439B2Jun 1, 2021
Synchronized multi-axis gyroscope
MURATA MANUFACTURING CO0 citations52
US10934157B2Mar 2, 2021
Packaged circuit system structure
MURATA MANUFACTURING CO0 citations52
US10884018B2Jan 5, 2021
Piezoelectric rotational MEMS resonator
MURATA MANUFACTURING CO0 citations52
US9611139B2Apr 4, 2017
Resonator
MURATA MANUFACTURING CO1 citations52
US9453775B2Sep 27, 2016
Pressure sensor
MURATA MANUFACTURING CO0 citations52
US11527497B2Dec 13, 2022
Electrical component with component interconnection element
MURATA MANUFACTURING CO0 citations46
US9969607B2May 15, 2018
Microelectromechanical device and method for manufacturing it
MURATA MANUFACTURING CO0 citations44
US10775172B2Sep 15, 2020
Piezoelectric gyroscope with transversal drive transducer
MURATA MANUFACTURING CO0 citations42
US10322927B2Jun 18, 2019
Microelectromechanical device and method for manufacturing it
MURATA MANUFACTURING CO0 citations42
US10317669B2Jun 11, 2019
Micro-optical electromechanical device and method for manufacturing it
MURATA MANUFACTURING CO0 citations42
US9663352B2May 30, 2017
Microelectromechanical device and a method of manufacturing
MURATA MANUFACTURING CO0 citations35
VAISALA OY
6 patentsUS4609966ASep 2, 1986
Absolute pressure transducer
VAISALA OY63 citations96
US4875134AOct 17, 1989
Pressure sensor construction and method for its fabrication
VAISALA OY39 citations92
US4831492AMay 16, 1989
Capacitor construction for use in pressure transducers
VAISALA OY37 citations92
US4378168AMar 29, 1983
Dew point detection method and device
VAISALA OY44 citations87
US4862317AAug 29, 1989
Capacitive pressure transducer
VAISALA OY15 citations74
US5083234AJan 21, 1992
Multilayer transducer with bonded contacts and method for implementation of bonding
VAISALA OY7 citations72
VTI TECHNOLOGIES OY
6 patentsUS7982291B2Jul 19, 2011
Method for manufacturing a microelectromechanical component, and a microelectromechanical component
VTI TECHNOLOGIES OY21 citations92
US7426863B2Sep 23, 2008
Method of manufacturing a capacitive acceleration sensor, and a capacitive acceleration sensor
VTI TECHNOLOGIES OY30 citations92
US6938485B2Sep 6, 2005
Capacitive acceleration sensor
VTI TECHNOLOGIES OY13 citations81
US6998059B2Feb 14, 2006
Method for manufacturing a silicon sensor and a silicon sensor
VTI TECHNOLOGIES OY7 citations70
US7932568B2Apr 26, 2011
Microelectromechanical component
VTI TECHNOLOGIES OY5 citations54
US7302857B2Dec 4, 2007
Method for reducing the temperature dependence of a capacitive sensor and a capacitive sensor construction
VTI TECHNOLOGIES OY0 citations38
KUISMA HEIKKI
4 patentsUS8450816B2May 28, 2013
Method for manufacturing a microelectromechanical component; and a microelectromechanical component
KUISMA HEIKKI7 citations83
US8124435B2Feb 28, 2012
Method for manufacturing a microelectromechanical component, and a microelectromechanical component
KUISMA HEIKKI13 citations83
US8878421B2Nov 4, 2014
Energy harvesting/tire pressure, temperature and tire data transmitter
KUISMA HEIKKI8 citations81
US9184131B2Nov 10, 2015
Method of making a system-in-package device
KUISMA HEIKKI3 citations62