Inventor
IGARASHI SHINICHI
JP15 patents
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IGARASHI SHINICHI
3 patentsSHINETSU CHEMICAL CO
3 patentsUS9164374B2Oct 20, 2015
Photomask making method, photomask blank and dry etching method
SHINETSU CHEMICAL CO0 citations52
US8992788B2Mar 31, 2015
Evaluation of etching conditions for pattern-forming film
SHINETSU CHEMICAL CO1 citations52
US9952501B2Apr 24, 2018
Photomask blank, making method, and photomask
SHINETSU CHEMICAL CO1 citations51