Inventor
TRAPP SHANE J
US21 patents
⚠️ This page may combine multiple inventors who share the name “TRAPP SHANE J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
20 patentsUS6630410B2Oct 7, 2003
Self-aligned PECVD etch mask
MICRON TECHNOLOGY INC48 citations96
US6451705B1Sep 17, 2002
Self-aligned PECVD etch mask
MICRON TECHNOLOGY INC66 citations96
US6569774B1May 27, 2003
Method to eliminate striations and surface roughness caused by dry etch
MICRON TECHNOLOGY INC63 citations95
US7153779B2Dec 26, 2006
Method to eliminate striations and surface roughness caused by dry etch
MICRON TECHNOLOGY INC40 citations92
US6897120B2May 24, 2005
Method of forming integrated circuitry and method of forming shallow trench isolation in a semiconductor substrate
MICRON TECHNOLOGY INC35 citations92
US7202171B2Apr 10, 2007
Method for forming a contact opening in a semiconductor device
MICRON TECHNOLOGY INC9 citations73
US11672118B2Jun 6, 2023
Electronic devices comprising adjoining oxide materials and related systems
MICRON TECHNOLOGY INC2 citations72
US9679852B2Jun 13, 2017
Semiconductor constructions
MICRON TECHNOLOGY INC4 citations72
US8889559B2Nov 18, 2014
Methods of forming a pattern on a substrate
MICRON TECHNOLOGY INC6 citations72
US7344975B2Mar 18, 2008
Method to reduce charge buildup during high aspect ratio contact etch
MICRON TECHNOLOGY INC5 citations72
US12557289B2Feb 17, 2026
Electronic devices comprising adjoining oxide materials and related systems
MICRON TECHNOLOGY INC0 citations62
US10930548B2Feb 23, 2021
Methods of forming an apparatus for making semiconductor dieves
MICRON TECHNOLOGY INC0 citations62
US7985692B2Jul 26, 2011
Method to reduce charge buildup during high aspect ratio contact etch
MICRON TECHNOLOGY INC2 citations61
US6806197B2Oct 19, 2004
Method of forming integrated circuitry, and method of forming a contact opening
MICRON TECHNOLOGY INC4 citations60
US9741580B2Aug 22, 2017
Substrate mask patterns, methods of forming a structure on a substrate, methods of forming a square lattice pattern from an oblique lattice pattern, and methods of forming a pattern on a substrate
MICRON TECHNOLOGY INC0 citations52
US9984977B2May 29, 2018
Semiconductor constructions
MICRON TECHNOLOGY INC1 citations51
US7419913B2Sep 2, 2008
Methods of forming openings into dielectric material
MICRON TECHNOLOGY INC1 citations51
US8999852B2Apr 7, 2015
Substrate mask patterns, methods of forming a structure on a substrate, methods of forming a square lattice pattern from an oblique lattice pattern, and methods of forming a pattern on a substrate
MICRON TECHNOLOGY INC1 citations50
US7291895B2Nov 6, 2007
Integrated circuitry
MICRON TECHNOLOGY INC0 citations49
US8889558B2Nov 18, 2014
Methods of forming a pattern on a substrate
MICRON TECHNOLOGY INC1 citations47