Inventor
CHIMMALGI ANANT
US25 patents
⚠️ This page may combine multiple inventors who share the name “CHIMMALGI ANANT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
21 patentsUS9318311B2Apr 19, 2016
Plasma cell for laser-sustained plasma light source
KLA TENCOR CORP21 citations92
US9390902B2Jul 12, 2016
Method and system for controlling convective flow in a light-sustained plasma
KLA TENCOR CORP13 citations84
US9263238B2Feb 16, 2016
Open plasma lamp for forming a light-sustained plasma
KLA TENCOR CORP10 citations84
US9927094B2Mar 27, 2018
Plasma cell for providing VUV filtering in a laser-sustained plasma light source
KLA TENCOR CORP11 citations83
US9530636B2Dec 27, 2016
Light source with nanostructured antireflection layer
KLA TENCOR CORP7 citations82
US8896827B2Nov 25, 2014
Diode laser based broad band light sources for wafer inspection tools
KLA TENCOR CORP10 citations82
US9941655B2Apr 10, 2018
High power broadband light source
KLA TENCOR CORP3 citations73
US9721761B2Aug 1, 2017
Open plasma lamp for forming a light-sustained plasma
KLA TENCOR CORP4 citations73
US10283342B2May 7, 2019
Laser sustained plasma light source with graded absorption features
KLA TENCOR CORP2 citations72
US10032620B2Jul 24, 2018
Broadband light source including transparent portion with high hydroxide content
KLA TENCOR CORP3 citations72
US10244613B2Mar 26, 2019
System and method for electrodeless plasma ignition in laser-sustained plasma light source
KLA TENCOR CORP5 citations71
US9615439B2Apr 4, 2017
System and method for inhibiting radiative emission of a laser-sustained plasma source
KLA TENCOR CORP5 citations71
US9899205B2Feb 20, 2018
System and method for inhibiting VUV radiative emission of a laser-sustained plasma source
KLA TENCOR CORP2 citations69
US10976025B2Apr 13, 2021
Plasma cell for providing VUV filtering in a laser-sustained plasma light source
KLA TENCOR CORP0 citations62
US9887076B2Feb 6, 2018
Method and system for controlling convective flow in a light-sustained plasma
KLA TENCOR CORP0 citations52
US9232622B2Jan 5, 2016
Gas refraction compensation for laser-sustained plasma bulbs
KLA TENCOR CORP1 citations52
US10522340B2Dec 31, 2019
Broadband light source including transparent portion with high hydroxide content
KLA TENCOR CORP0 citations51
US9110037B2Aug 18, 2015
Diode laser based broad band light sources for wafer inspection tools
KLA TENCOR CORP1 citations51
US9341761B2May 17, 2016
Switchable laser and fiber based lamphouse for optimal power output in different wavelength bands and pixel sizes
KLA TENCOR CORP0 citations50
US9534848B2Jan 3, 2017
Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures
KLA TENCOR CORP1 citations48
US10257918B2Apr 9, 2019
System and method for laser-sustained plasma illumination
KLA TENCOR CORP0 citations37
CARBON INC
3 patentsUS11104061B2Aug 31, 2021
Stereolithography apparatus with individually addressable light source arrays
CARBON INC0 citations48
US12240164B2Mar 4, 2025
Window variability correction in additive manufacturing
CARBON INC0 citations47
US11084207B2Aug 10, 2021
Window variability correction in additive manufacturing
CARBON INC0 citations47