Inventor

VORA YOUNUS

US5 patents

⚠️ This page may combine multiple inventors who share the name “VORA YOUNUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

3 patents

US8896827B2Nov 25, 2014

Diode laser based broad band light sources for wafer inspection tools

KLA TENCOR CORP10 citations82

US9110037B2Aug 18, 2015

Diode laser based broad band light sources for wafer inspection tools

KLA TENCOR CORP1 citations51

US9534848B2Jan 3, 2017

Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures

KLA TENCOR CORP1 citations48

PROMETRIX CORP

1 patent

US5386317AJan 31, 1995

Method and apparatus for imaging dense linewidth features using an optical microscope

PROMETRIX CORP46 citations89

FISCHER VERLYN

1 patent

US8073240B2Dec 6, 2011

Computer-implemented methods, computer-readable media, and systems for identifying one or more optical modes of an inspection system as candidates for use in inspection of a layer of a wafer

FISCHER VERLYN28 citations84