P

Inventor

BAUER MATTHIAS

DE64 patents
⚠️ This page may combine multiple inventors who share the name “BAUER MATTHIAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM INC

20 patents
US7939447B2May 10, 2011

Inhibitors for selective deposition of silicon containing films

ASM INC536 citations99
US8367528B2Feb 5, 2013

Cyclical epitaxial deposition and etch

ASM INC587 citations98
US7863163B2Jan 4, 2011

Epitaxial deposition of doped semiconductor materials

ASM INC109 citations98
US7208354B2Apr 24, 2007

Deposition of silicon germanium on silicon-on-insulator structures and bulk substrates

ASM INC111 citations98
US7438760B2Oct 21, 2008

Methods of making substitutionally carbon-doped crystalline Si-containing materials by chemical vapor deposition

ASM INC37 citations96
US7238595B2Jul 3, 2007

Epitaxial semiconductor deposition methods and structures

ASM INC47 citations95
US7816236B2Oct 19, 2010

Selective deposition of silicon-containing films

ASM INC42 citations94
US7682947B2Mar 23, 2010

Epitaxial semiconductor deposition methods and structures

ASM INC21 citations92
US7402504B2Jul 22, 2008

Epitaxial semiconductor deposition methods and structures

ASM INC21 citations92
US7115521B2Oct 3, 2006

Epitaxial semiconductor deposition methods and structures

ASM INC20 citations92
US7479443B2Jan 20, 2009

Germanium deposition

ASM INC16 citations89
US7329593B2Feb 12, 2008

Germanium deposition

ASM INC31 citations89
US7897491B2Mar 1, 2011

Separate injection of reactive species in selective formation of films

ASM INC7 citations84
US7687383B2Mar 30, 2010

Methods of depositing electrically active doped crystalline Si-containing films

ASM INC9 citations84
US7648853B2Jan 19, 2010

Dual channel heterostructure

ASM INC9 citations84
US7514372B2Apr 7, 2009

Epitaxial growth of relaxed silicon germanium layers

ASM INC9 citations84
US7289865B2Oct 30, 2007

Optimization algorithm to optimize within substrate uniformities

ASM INC14 citations84
US7648690B2Jan 19, 2010

Methods of making substitutionally carbon-doped crystalline Si-containing materials by chemical vapor deposition

ASM INC4 citations73
US7666799B2Feb 23, 2010

Epitaxial growth of relaxed silicon germanium layers

ASM INC3 citations62
US8834955B2Sep 16, 2014

Methods and apparatus for a gas panel with constant gas flow

ASM INC3 citations61

APPLIED MATERIALS INC

11 patents
US9853129B2Dec 26, 2017

Forming non-line-of-sight source drain extension in an nMOS finFET using n-doped selective epitaxial growth

APPLIED MATERIALS INC18 citations92
US10691145B2Jun 23, 2020

Multi-channel flow ratio controller and processing chamber

APPLIED MATERIALS INC3 citations73
US10103028B2Oct 16, 2018

Contact integration and selective silicide formation methods

APPLIED MATERIALS INC3 citations73
US12027607B2Jul 2, 2024

Methods for GAA I/O formation by selective epi regrowth

APPLIED MATERIALS INC2 citations70
US11393916B2Jul 19, 2022

Methods for GAA I/O formation by selective epi regrowth

APPLIED MATERIALS INC2 citations70
US11537151B2Dec 27, 2022

Multi-channel flow ratio controller and processing chamber

APPLIED MATERIALS INC0 citations63
US10964544B2Mar 30, 2021

Contact integration and selective silicide formation methods

APPLIED MATERIALS INC0 citations63
US11309404B2Apr 19, 2022

Integrated CMOS source drain formation with advanced control

APPLIED MATERIALS INC1 citations62
US12060651B2Aug 13, 2024

Chamber architecture for epitaxial deposition and advanced epitaxial film applications

APPLIED MATERIALS INC1 citations61
US12091749B2Sep 17, 2024

Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outlet

APPLIED MATERIALS INC1 citations60
US10312096B2Jun 4, 2019

Methods for titanium silicide formation using TiCl4 precursor and silicon-containing precursor

APPLIED MATERIALS INC0 citations52

BAUER MATTHIAS

5 patents

EMZ HANAUER GMBH & CO KGAA

4 patents

AIRBUS OPERATIONS GMBH

3 patents

BOSCH GMBH ROBERT

2 patents

GÖLLING BURKHARD

2 patents

ELECTROLUX HOME PROD INC

1 patent

INFINEON TECHNOLOGIES AG

1 patent

CHT Germany GmbH

1 patent

Showing the top 50 of 64 patents by PatentIndex Score.