Inventor
BAUER MATTHIAS
DE64 patents
⚠️ This page may combine multiple inventors who share the name “BAUER MATTHIAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INC
20 patentsUS7939447B2May 10, 2011
Inhibitors for selective deposition of silicon containing films
ASM INC536 citations99
US8367528B2Feb 5, 2013
Cyclical epitaxial deposition and etch
ASM INC587 citations98
US7863163B2Jan 4, 2011
Epitaxial deposition of doped semiconductor materials
ASM INC109 citations98
US7208354B2Apr 24, 2007
Deposition of silicon germanium on silicon-on-insulator structures and bulk substrates
ASM INC111 citations98
US7438760B2Oct 21, 2008
Methods of making substitutionally carbon-doped crystalline Si-containing materials by chemical vapor deposition
ASM INC37 citations96
US7238595B2Jul 3, 2007
Epitaxial semiconductor deposition methods and structures
ASM INC47 citations95
US7816236B2Oct 19, 2010
Selective deposition of silicon-containing films
ASM INC42 citations94
US7682947B2Mar 23, 2010
Epitaxial semiconductor deposition methods and structures
ASM INC21 citations92
US7402504B2Jul 22, 2008
Epitaxial semiconductor deposition methods and structures
ASM INC21 citations92
US7115521B2Oct 3, 2006
Epitaxial semiconductor deposition methods and structures
ASM INC20 citations92
US7479443B2Jan 20, 2009
Germanium deposition
ASM INC16 citations89
US7329593B2Feb 12, 2008
Germanium deposition
ASM INC31 citations89
US7897491B2Mar 1, 2011
Separate injection of reactive species in selective formation of films
ASM INC7 citations84
US7687383B2Mar 30, 2010
Methods of depositing electrically active doped crystalline Si-containing films
ASM INC9 citations84
US7648853B2Jan 19, 2010
Dual channel heterostructure
ASM INC9 citations84
US7514372B2Apr 7, 2009
Epitaxial growth of relaxed silicon germanium layers
ASM INC9 citations84
US7289865B2Oct 30, 2007
Optimization algorithm to optimize within substrate uniformities
ASM INC14 citations84
US7648690B2Jan 19, 2010
Methods of making substitutionally carbon-doped crystalline Si-containing materials by chemical vapor deposition
ASM INC4 citations73
US7666799B2Feb 23, 2010
Epitaxial growth of relaxed silicon germanium layers
ASM INC3 citations62
US8834955B2Sep 16, 2014
Methods and apparatus for a gas panel with constant gas flow
ASM INC3 citations61
APPLIED MATERIALS INC
11 patentsUS9853129B2Dec 26, 2017
Forming non-line-of-sight source drain extension in an nMOS finFET using n-doped selective epitaxial growth
APPLIED MATERIALS INC18 citations92
US10691145B2Jun 23, 2020
Multi-channel flow ratio controller and processing chamber
APPLIED MATERIALS INC3 citations73
US10103028B2Oct 16, 2018
Contact integration and selective silicide formation methods
APPLIED MATERIALS INC3 citations73
US12027607B2Jul 2, 2024
Methods for GAA I/O formation by selective epi regrowth
APPLIED MATERIALS INC2 citations70
US11393916B2Jul 19, 2022
Methods for GAA I/O formation by selective epi regrowth
APPLIED MATERIALS INC2 citations70
US11537151B2Dec 27, 2022
Multi-channel flow ratio controller and processing chamber
APPLIED MATERIALS INC0 citations63
US10964544B2Mar 30, 2021
Contact integration and selective silicide formation methods
APPLIED MATERIALS INC0 citations63
US11309404B2Apr 19, 2022
Integrated CMOS source drain formation with advanced control
APPLIED MATERIALS INC1 citations62
US12060651B2Aug 13, 2024
Chamber architecture for epitaxial deposition and advanced epitaxial film applications
APPLIED MATERIALS INC1 citations61
US12091749B2Sep 17, 2024
Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outlet
APPLIED MATERIALS INC1 citations60
US10312096B2Jun 4, 2019
Methods for titanium silicide formation using TiCl4 precursor and silicon-containing precursor
APPLIED MATERIALS INC0 citations52
BAUER MATTHIAS
5 patentsUS8809170B2Aug 19, 2014
High throughput cyclical epitaxial deposition and etch process
BAUER MATTHIAS423 citations99
US8278176B2Oct 2, 2012
Selective epitaxial formation of semiconductor films
BAUER MATTHIAS559 citations98
US9312131B2Apr 12, 2016
Selective epitaxial formation of semiconductive films
BAUER MATTHIAS38 citations94
US8728239B2May 20, 2014
Methods and apparatus for a gas panel with constant gas flow
BAUER MATTHIAS16 citations82
US9190515B2Nov 17, 2015
Structure comprises an As-deposited doped single crystalline Si-containing film
BAUER MATTHIAS2 citations63
EMZ HANAUER GMBH & CO KGAA
4 patentsUS11889965B2Feb 6, 2024
Domestic appliance with a latching and opening function for a door of the domestic appliance
EMZ HANAUER GMBH & CO KGAA2 citations72
US12091891B2Sep 17, 2024
Domestic dishwashing machine and door latch therefor
EMZ HANAUER GMBH & CO KGAA1 citations63
US10827904B2Nov 10, 2020
Domestic electrical appliance, in particular a dishwashing machine
EMZ HANAUER GMBH & CO KGAA1 citations62
US11434662B2Sep 6, 2022
Door latch for an electrical domestic appliance
EMZ HANAUER GMBH & CO KGAA0 citations52
AIRBUS OPERATIONS GMBH
3 patentsUS9573679B2Feb 21, 2017
Fluid actuator for influencing the flow along a flow surface, as well as blow-out device and flow body comprising a like fluid actuator
AIRBUS OPERATIONS GMBH13 citations82
US9618150B2Apr 11, 2017
Device for generating fluid pulses
AIRBUS OPERATIONS GMBH12 citations79
US9371131B2Jun 21, 2016
Flow body having a leading edge, a surface and an active flow control system and vehicle comprising at least one such flow body and an air source
AIRBUS OPERATIONS GMBH4 citations69
BOSCH GMBH ROBERT
2 patentsGÖLLING BURKHARD
2 patentsELECTROLUX HOME PROD INC
1 patentINFINEON TECHNOLOGIES AG
1 patentCHT Germany GmbH
1 patentShowing the top 50 of 64 patents by PatentIndex Score.