Inventor

MESTROM WILBERT JAN

NL7 patents

⚠️ This page may combine multiple inventors who share the name “MESTROM WILBERT JAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

4 patents

US9753383B2Sep 5, 2017

Radiation source and lithographic apparatus

ASML NETHERLANDS BV2 citations69

US10394141B2Aug 27, 2019

Radiation source and lithographic apparatus

ASML NETHERLANDS BV1 citations58

US9648714B2May 9, 2017

Fuel system for lithographic apparatus, EUV source, lithographic apparatus and fuel filtering method

ASML NETHERLANDS BV0 citations50

US9510432B2Nov 29, 2016

Radiation source and lithographic apparatus

ASML NETHERLANDS BV0 citations50

MESTROM WILBERT JAN

2 patents

US8598551B2Dec 3, 2013

EUV radiation source comprising a droplet accelerator and lithographic apparatus

MESTROM WILBERT JAN11 citations80

US9007560B2Apr 14, 2015

Radiation source

MESTROM WILBERT JAN1 citations48

KEMPEN ANTONIUS THEODORUS WILHELMUS

1 patent

US9164403B2Oct 20, 2015

Radiation source, lithographic apparatus and device manufacturing method

KEMPEN ANTONIUS THEODORUS WILHELMUS1 citations49