Inventor

KAMPINGA WIM RONALD

NL3 patents

Patents

3 patents

US9753383B2Sep 5, 2017

Radiation source and lithographic apparatus

ASML NETHERLANDS BV2 citations69

US10394141B2Aug 27, 2019

Radiation source and lithographic apparatus

ASML NETHERLANDS BV1 citations58

US10481498B2Nov 19, 2019

Droplet generator for lithographic apparatus, EUV source and lithographic apparatus

ASML NETHERLANDS BV1 citations57