Inventor
CASTELIJNS HENRICUS JOZEF
NL11 patents
⚠️ This page may combine multiple inventors who share the name “CASTELIJNS HENRICUS JOZEF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
6 patentsUS9588437B2Mar 7, 2017
Fluid handling structure, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV2 citations72
US9983489B2May 29, 2018
Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiation
ASML NETHERLANDS BV5 citations71
US9753383B2Sep 5, 2017
Radiation source and lithographic apparatus
ASML NETHERLANDS BV2 citations69
US10394141B2Aug 27, 2019
Radiation source and lithographic apparatus
ASML NETHERLANDS BV1 citations58
US9971255B2May 15, 2018
Fluid handling structure, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations51
US12591178B2Mar 31, 2026
Method for adjusting a patterning process
ASML NETHERLANDS BV0 citations42