Inventor
JILISEN REINIER THEODORUS MARTINUS
NL8 patents
⚠️ This page may combine multiple inventors who share the name “JILISEN REINIER THEODORUS MARTINUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS9753383B2Sep 5, 2017
Radiation source and lithographic apparatus
ASML NETHERLANDS BV2 citations69
US10379443B2Aug 13, 2019
Radiation source device, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations65
US10394141B2Aug 27, 2019
Radiation source and lithographic apparatus
ASML NETHERLANDS BV1 citations58
US11703768B2Jul 18, 2023
Lithographic apparatus and related methods
ASML NETHERLANDS BV0 citations52
US10588211B2Mar 10, 2020
Radiation source having debris control
ASML NETHERLANDS BV1 citations52
US10095119B2Oct 9, 2018
Radiation source and method for lithography
ASML NETHERLANDS BV0 citations50
US12326428B2Jun 10, 2025
Residual gas analyzer
ASML NETHERLANDS BV0 citations35