Inventor

VAN DER STRAATEN GERRIT

NL3 patents

Patents

3 patents

US9753383B2Sep 5, 2017

Radiation source and lithographic apparatus

ASML NETHERLANDS BV2 citations69

US10394141B2Aug 27, 2019

Radiation source and lithographic apparatus

ASML NETHERLANDS BV1 citations58

US12235585B2Feb 25, 2025

Radiation conduit

ASML NETHERLANDS BV0 citations53