Inventor
POLLET OLIVIER
FR5 patents
Patents
5 patentsUS10043890B2Aug 7, 2018
Method of forming spacers for a gate of a transistor
COMMISSARIAT ENERGIE ATOMIQUE7 citations81
US12215430B2Feb 4, 2025
Method for increasing the surface roughness of a metal layer
COMMISSARIAT ENERGIE ATOMIQUE0 citations60
US12094722B2Sep 17, 2024
Method for increasing the surface roughness of a metal layer
COMMISSARIAT ENERGIE ATOMIQUE0 citations60
US11127835B2Sep 21, 2021
Method for etching a three-dimensional dielectric layer
COMMISSARIAT ENERGIE ATOMIQUE1 citations54
US9947541B2Apr 17, 2018
Method of forming spacers for a gate of a transistor
COMMISSARIAT ENERGIE ATOMIQUE1 citations47