Inventor
GARCIA-BARROS MAXIME
FR3 patents
Patents
3 patentsUS9780000B2Oct 3, 2017
Method for forming spacers for a transitor gate
COMMISSARIAT ENERGIE ATOMIQUE2 citations68
US9947541B2Apr 17, 2018
Method of forming spacers for a gate of a transistor
COMMISSARIAT ENERGIE ATOMIQUE1 citations47
US10658197B2May 19, 2020
Method for producing low-permittivity spacers
COMMISSARIAT ENERGIE ATOMIQUE0 citations38