Inventor
KAWASAKI KATSUMASA
US19 patents
⚠️ This page may combine multiple inventors who share the name “KAWASAKI KATSUMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
18 patentsUS9872373B1Jan 16, 2018
Smart multi-level RF pulsing methods
APPLIED MATERIALS INC102 citations97
US9788405B2Oct 10, 2017
RF power delivery with approximated saw tooth wave pulsing
APPLIED MATERIALS INC47 citations93
US9754767B2Sep 5, 2017
RF pulse reflection reduction for processing substrates
APPLIED MATERIALS INC33 citations93
US9614524B1Apr 4, 2017
Automatic impedance tuning with RF dual level pulsing
APPLIED MATERIALS INC25 citations93
US8962488B2Feb 24, 2015
Synchronized radio frequency pulsing for plasma etching
APPLIED MATERIALS INC30 citations93
US11694876B2Jul 4, 2023
Apparatus and method for delivering a plurality of waveform signals during plasma processing
APPLIED MATERIALS INC10 citations86
US10593518B1Mar 17, 2020
Methods and apparatus for etching semiconductor structures
APPLIED MATERIALS INC9 citations83
US9269587B2Feb 23, 2016
Methods for etching materials using synchronized RF pulses
APPLIED MATERIALS INC8 citations83
US10790126B2Sep 29, 2020
Smart RF pulsing tuning using variable frequency generators
APPLIED MATERIALS INC3 citations72
US9741539B2Aug 22, 2017
RF power delivery regulation for processing substrates
APPLIED MATERIALS INC4 citations70
US12482633B2Nov 25, 2025
Apparatus and method for delivering a plurality of waveform signals during plasma processing
APPLIED MATERIALS INC0 citations62
US10854427B2Dec 1, 2020
Radio frequency (RF) pulsing impedance tuning with multiplier mode
APPLIED MATERIALS INC1 citations62
US10424467B2Sep 24, 2019
Smart RF pulsing tuning using variable frequency generators
APPLIED MATERIALS INC1 citations62
US11164723B2Nov 2, 2021
Methods and apparatus for etching semiconductor structures
APPLIED MATERIALS INC0 citations61
US10930471B2Feb 23, 2021
Methods and apparatus for etching semiconductor structures
APPLIED MATERIALS INC0 citations61
US10468233B2Nov 5, 2019
RF power delivery regulation for processing substrates
APPLIED MATERIALS INC1 citations60
US12046449B2Jul 23, 2024
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC0 citations58
US12476081B2Nov 18, 2025
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC0 citations47