Inventor
SHEN SHIH-HAUR
US25 patents
⚠️ This page may combine multiple inventors who share the name “SHEN SHIH-HAUR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
23 patentsUS9281253B2Mar 8, 2016
Determination of gain for eddy current sensor
APPLIED MATERIALS INC28 citations94
US10994389B2May 4, 2021
Polishing apparatus using neural network for monitoring
APPLIED MATERIALS INC11 citations85
US9636797B2May 2, 2017
Adjusting eddy current measurements
APPLIED MATERIALS INC11 citations84
US9205527B2Dec 8, 2015
In-situ monitoring system with monitoring of elongated region
APPLIED MATERIALS INC7 citations84
US10391610B2Aug 27, 2019
Core configuration for in-situ electromagnetic induction monitoring system
APPLIED MATERIALS INC6 citations83
US12320883B2Jun 3, 2025
Resistivity-based adjustment of thresholds for in-situ monitoring
APPLIED MATERIALS INC1 citations74
US11199605B2Dec 14, 2021
Resistivity-based adjustment of measurements from in-situ monitoring
APPLIED MATERIALS INC1 citations73
US11079459B2Aug 3, 2021
Resistivity-based calibration of in-situ electromagnetic inductive monitoring
APPLIED MATERIALS INC1 citations73
US10562148B2Feb 18, 2020
Real time profile control for chemical mechanical polishing
APPLIED MATERIALS INC6 citations73
US10556315B2Feb 11, 2020
Determination of gain for eddy current sensor
APPLIED MATERIALS INC1 citations73
US11638982B2May 2, 2023
Core configuration for in-situ electromagnetic induction monitoring system
APPLIED MATERIALS INC1 citations72
US9472475B2Oct 18, 2016
Feedback control using detection of clearance and adjustment for uniform topography
APPLIED MATERIALS INC2 citations63
US12576475B2Mar 17, 2026
Determining the orientation of a substrate in-situ
APPLIED MATERIALS INC0 citations62
US12447577B2Oct 21, 2025
Polishing apparatus using neural network for monitoring
APPLIED MATERIALS INC0 citations62
US12103135B2Oct 1, 2024
Core configuration for in-situ electromagnetic induction monitoring system
APPLIED MATERIALS INC0 citations62
US11004708B2May 11, 2021
Core configuration with alternating posts for in-situ electromagnetic induction monitoring system
APPLIED MATERIALS INC1 citations62
US10350723B2Jul 16, 2019
Overpolishing based on electromagnetic inductive monitoring of trench depth
APPLIED MATERIALS INC1 citations62
US10207386B2Feb 19, 2019
Determination of gain for eddy current sensor
APPLIED MATERIALS INC1 citations62
US10589397B2Mar 17, 2020
Endpoint control of multiple substrate zones of varying thickness in chemical mechanical polishing
APPLIED MATERIALS INC1 citations61
US11826872B2Nov 28, 2023
Temperature and slurry flow rate control in CMP
APPLIED MATERIALS INC0 citations52
US10427272B2Oct 1, 2019
Endpoint detection with compensation for filtering
APPLIED MATERIALS INC0 citations52
US12214468B2Feb 4, 2025
Temperature control of chemical mechanical polishing
APPLIED MATERIALS INC0 citations50
US9275917B2Mar 1, 2016
Determination of gain for eddy current sensor
APPLIED MATERIALS INC0 citations41