Inventor
EVANS FRANK G
US8 patents
⚠️ This page may combine multiple inventors who share the name “EVANS FRANK G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ELECTRO SCIENT IND INC
4 patentsUS7425471B2Sep 16, 2008
Semiconductor structure processing using multiple laser beam spots spaced on-axis with cross-axis offset
ELECTRO SCIENT IND INC49 citations95
US7935941B2May 3, 2011
Semiconductor structure processing using multiple laser beam spots spaced on-axis on non-adjacent structures
ELECTRO SCIENT IND INC22 citations92
US6678058B2Jan 13, 2004
Integrated alignment and calibration of optical system
ELECTRO SCIENT IND INC21 citations92
US7923306B2Apr 12, 2011
Semiconductor structure processing using multiple laser beam spots
ELECTRO SCIENT IND INC6 citations73