Inventor
LEE MUN HEE
KR4 patents
⚠️ This page may combine multiple inventors who share the name “LEE MUN HEE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
2 patentsUS7041990B2May 9, 2006
Apparatus for monitoring ion-implantation input parameter in semiconductor fabricating devices and monitoring method thereof
SAMSUNG ELECTRONICS CO LTD6 citations58
US7707471B2Apr 27, 2010
Method of defining fault pattern of equipment and method of monitoring equipment using the same
SAMSUNG ELECTRONICS CO LTD0 citations43