P

Inventor

YAMAMOTO TAKUMA

JP68 patents
⚠️ This page may combine multiple inventors who share the name “YAMAMOTO TAKUMA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

16 patents
US9852881B2Dec 26, 2017

Scanning electron microscope system, pattern measurement method using same, and scanning electron microscope

HITACHI HIGH TECH CORP9 citations84
US9858659B2Jan 2, 2018

Pattern inspecting and measuring device and program

HITACHI HIGH TECH CORP9 citations83
US9390885B2Jul 12, 2016

Superposition measuring apparatus, superposition measuring method, and superposition measuring system

HITACHI HIGH TECH CORP3 citations72
US11353798B2Jun 7, 2022

Pattern measurement device and pattern measurement method

HITACHI HIGH TECH CORP2 citations71
US10816332B2Oct 27, 2020

Pattern measurement device and pattern measurement method

HITACHI HIGH TECH CORP3 citations71
US11545336B2Jan 3, 2023

Scanning electron microscopy system and pattern depth measurement method

HITACHI HIGH TECH CORP2 citations70
US12176181B2Dec 24, 2024

Pattern inspecting device

HITACHI HIGH TECH CORP1 citations62
US11728127B2Aug 15, 2023

Charged particle beam device

HITACHI HIGH TECH CORP0 citations62
US11562882B2Jan 24, 2023

Scanning electron microscope

HITACHI HIGH TECH CORP1 citations62
US11195690B2Dec 7, 2021

Charged particle beam device

HITACHI HIGH TECH CORP0 citations62
US11133148B2Sep 28, 2021

Scanning electron microscope

HITACHI HIGH TECH CORP0 citations62
US9224575B2Dec 29, 2015

Charged particle beam device and overlay misalignment measurement method

HITACHI HIGH TECH CORP3 citations62
US12174551B2Dec 24, 2024

Pattern measurement device and pattern measurement method

HITACHI HIGH TECH CORP0 citations61
US11302513B2Apr 12, 2022

Electron microscope apparatus, inspection system using electron microscope apparatus, and inspection method using electron microscope apparatus

HITACHI HIGH TECH CORP1 citations59
US12422386B2Sep 23, 2025

Pattern measurement device

HITACHI HIGH TECH CORP0 citations52
US12183541B2Dec 31, 2024

Charged particle beam system and overlay misalignment measurement method

HITACHI HIGH TECH CORP0 citations52

SHARP DISPLAY TECHNOLOGY CORP

11 patents

SHARP KK

7 patents

FUJIFILM BUSINESS INNOVATION CORP

5 patents

FUJITSU LTD

4 patents

TOSHIBA KK

3 patents

SUZUKI MAKOTO

1 patent

MISHIMA NAO

1 patent

KAWATA SATOSHI

1 patent

YAMAMOTO TAKUMA

1 patent

Showing the top 50 of 68 patents by PatentIndex Score.