Inventor
WOYTOWITZ PETER
US6 patents
⚠️ This page may combine multiple inventors who share the name “WOYTOWITZ PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
3 patentsUS7327948B1Feb 5, 2008
Cast pedestal with heating element and coaxial heat exchanger
NOVELLUS SYSTEMS INC582 citations96
US7048316B1May 23, 2006
Compound angled pad end-effector
NOVELLUS SYSTEMS INC64 citations96
US7941039B1May 10, 2011
Pedestal heat transfer and temperature control
NOVELLUS SYSTEMS INC36 citations90