Inventor
BURKHART VINCENT
US8 patents
⚠️ This page may combine multiple inventors who share the name “BURKHART VINCENT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
6 patentsUS11086233B2Aug 10, 2021
Protective coating for electrostatic chucks
LAM RES CORP10 citations81
US11990360B2May 21, 2024
Electrostatic chuck (ESC) pedestal voltage isolation
LAM RES CORP3 citations71
US11835868B2Dec 5, 2023
Protective coating for electrostatic chucks
LAM RES CORP3 citations68
US12243725B2Mar 4, 2025
High temperature RF connection with integral thermal choke
LAM RES CORP1 citations61
US11232966B2Jan 25, 2022
Electrostatic chucking pedestal with substrate backside purging and thermal sinking
LAM RES CORP1 citations60
US10832936B2Nov 10, 2020
Substrate support with increasing areal density and corresponding method of fabricating
LAM RES CORP1 citations60