Inventor
RUMER MICHAEL
US5 patents
⚠️ This page may combine multiple inventors who share the name “RUMER MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
4 patentsUS10832936B2Nov 10, 2020
Substrate support with increasing areal density and corresponding method of fabricating
LAM RES CORP1 citations60
US10895539B2Jan 19, 2021
In-situ chamber clean end point detection systems and methods using computer vision systems
LAM RES CORP1 citations59
US11725285B2Aug 15, 2023
Preventing deposition on pedestal in semiconductor substrate processing
LAM RES CORP0 citations42
US9938616B2Apr 10, 2018
Physical vapor deposition of low-stress nitrogen-doped tungsten films
LAM RES CORP0 citations39