Inventor
HOU BENXIANG
CN3 patents
Patents
3 patentsUS11131504B2Sep 28, 2021
Temperature monitoring system and method for a substrate heating furnace
BOE TECHNOLOGY GROUP CO LTD0 citations55
US10886052B2Jan 5, 2021
Adsorption bar, vacuum aligner system, and control method of vacuum aligner system
BOE TECHNOLOGY GROUP CO LTD0 citations53
US10969643B2Apr 6, 2021
Mask and manufacturing method thereof, and light shielding device and control method thereof
BOE TECHNOLOGY GROUP CO LTD0 citations41