Inventor
TANG TSUNG-TA
TW10 patents
⚠️ This page may combine multiple inventors who share the name “TANG TSUNG-TA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
9 patentsUS10535523B1Jan 14, 2020
Formation and in-situ etching processes for metal layers
TAIWAN SEMICONDUCTOR MFG CO LTD12 citations93
US11282938B2Mar 22, 2022
Capping layers in metal gates of transistors
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations80
US12255104B2Mar 18, 2025
Semiconductor device and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations74
US11545363B2Jan 3, 2023
Formation and in-situ etching processes for metal layers
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US12170202B2Dec 17, 2024
Formation and in-situ etching processes for metal layers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12040235B2Jul 16, 2024
Semiconductor device and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11437280B2Sep 6, 2022
Semiconductor device and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12376361B2Jul 29, 2025
Capping layers in metal gates of transistors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10872769B2Dec 22, 2020
Formation and in-situ etching processes for metal layers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51