P

Inventor

PAI UDAY

US9 patents
⚠️ This page may combine multiple inventors who share the name “PAI UDAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

6 patents
US9960021B2May 1, 2018

Physical vapor deposition (PVD) target having low friction pads

APPLIED MATERIALS INC5 citations72
US11440159B2Sep 13, 2022

Edge load ring

APPLIED MATERIALS INC0 citations61
US9343274B2May 17, 2016

Process kit shield for plasma enhanced processing chamber

APPLIED MATERIALS INC2 citations61
US11950384B2Apr 2, 2024

Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers

APPLIED MATERIALS INC0 citations55
US11602064B2Mar 7, 2023

Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers

APPLIED MATERIALS INC0 citations55
US10199204B2Feb 5, 2019

Target retaining apparatus

APPLIED MATERIALS INC0 citations46

RASHEED MUHAMMAD

1 patent
US8647485B2Feb 11, 2014

Process kit shield for plasma enhanced processing chamber

RASHEED MUHAMMAD4 citations71

YOUNG DONNY

1 patent
US9303311B2Apr 5, 2016

Substrate processing system with mechanically floating target assembly

YOUNG DONNY1 citations50

RITCHIE ALAN

1 patent
US8702918B2Apr 22, 2014

Apparatus for enabling concentricity of plasma dark space

RITCHIE ALAN1 citations50