Inventor
LIU SHAOHUI
CN8 patents
⚠️ This page may combine multiple inventors who share the name “LIU SHAOHUI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD
3 patentsUS10937672B2Mar 2, 2021
Heating device and heating chamber
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD1 citations59
US11315768B2Apr 26, 2022
Loading apparatus and physical vapor deposition apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations55
US10984994B2Apr 20, 2021
Deposition apparatus and physical vapor deposition chamber
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations49