Inventor
NISHISAKA TOSHIHIRO
JP29 patents
⚠️ This page may combine multiple inventors who share the name “NISHISAKA TOSHIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GIGAPHOTON INC
19 patentsUS8785895B2Jul 22, 2014
Target supply apparatus, chamber, and extreme ultraviolet light generation apparatus
GIGAPHOTON INC7 citations84
US10136510B2Nov 20, 2018
Extreme ultraviolet light generation device
GIGAPHOTON INC4 citations73
US10349508B2Jul 9, 2019
Target storage device
GIGAPHOTON INC2 citations72
US9332625B2May 3, 2016
Extreme ultraviolet light source apparatus
GIGAPHOTON INC1 citations63
US11061340B2Jul 13, 2021
Mount, extreme ultraviolet light generation system, and device manufacturing method
GIGAPHOTON INC0 citations62
US10674590B2Jun 2, 2020
Tank, target generation device, and extreme-UV-light generation device
GIGAPHOTON INC1 citations61
US8872145B2Oct 28, 2014
Target supply device
GIGAPHOTON INC3 citations61
US11452196B2Sep 20, 2022
EUV chamber apparatus, extreme ultraviolet light generation system, and electronic device manufacturing method
GIGAPHOTON INC0 citations58
US11789374B2Oct 17, 2023
Extreme ultraviolet light generation apparatus and electronic device manufacturing method
GIGAPHOTON INC0 citations57
US11363706B2Jun 14, 2022
Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method
GIGAPHOTON INC0 citations52
US11320740B2May 3, 2022
Target supply device, target supply method, and electronic device manufacturing method
GIGAPHOTON INC0 citations52
US10698316B2Jun 30, 2020
Target generation device replacement trolley, target generation device replacement system, and target generation device replacement method
GIGAPHOTON INC0 citations52
US10009991B2Jun 26, 2018
Target supply apparatus and EUV light generating apparatus
GIGAPHOTON INC1 citations52
US9429847B2Aug 30, 2016
Extreme ultraviolet light source apparatus
GIGAPHOTON INC0 citations52
US9233782B2Jan 12, 2016
Target supply device
GIGAPHOTON INC0 citations52
US9040943B2May 26, 2015
Chamber and extreme ultraviolet light generation apparatus
GIGAPHOTON INC0 citations52
US8779402B2Jul 15, 2014
Target supply device
GIGAPHOTON INC1 citations52
US10524343B2Dec 31, 2019
Extreme ultraviolet light generation apparatus
GIGAPHOTON INC0 citations41
US10372041B2Aug 6, 2019
Target generation device and extreme ultraviolet light generation device
GIGAPHOTON INC0 citations41
KOMATSU MFG CO LTD
4 patentsUS5754579AMay 19, 1998
Laser gas controller and charging/discharging device for discharge-excited laser
KOMATSU MFG CO LTD69 citations96
US6389049B2May 14, 2002
Discharge circuit for pulsed laser and pulsed power source
KOMATSU MFG CO LTD14 citations79
US6577664B1Jun 10, 2003
Excimer laser device
KOMATSU MFG CO LTD10 citations72
US6337872B1Jan 8, 2002
Once through fan for excimer laser apparatus
KOMATSU MFG CO LTD13 citations72
NISHISAKA TOSHIHIRO
3 patentsUS9052615B2Jun 9, 2015
Extreme ultraviolet light source apparatus
NISHISAKA TOSHIHIRO3 citations61
US8759804B2Jun 24, 2014
Chamber apparatus and extreme ultraviolet light generation system
NISHISAKA TOSHIHIRO3 citations61
US8698111B2Apr 15, 2014
Extreme ultraviolet light generation system
NISHISAKA TOSHIHIRO2 citations61