Inventor
HAYASAKA SHINICHIRO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “HAYASAKA SHINICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS7896967B2Mar 1, 2011
Gas supply system, substrate processing apparatus and gas supply method
TOKYO ELECTRON LTD22 citations90
US9732909B2Aug 15, 2017
Gas supply method
TOKYO ELECTRON LTD5 citations78
US11899476B2Feb 13, 2024
Method and apparatus for measuring gas flow
TOKYO ELECTRON LTD0 citations45
US10316835B2Jun 11, 2019
Method of determining output flow rate of gas output by flow rate controller of substrate processing apparatus
TOKYO ELECTRON LTD0 citations33