Inventor
TAMURA CHIHIRO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “TAMURA CHIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS12349434B2Jul 1, 2025
Manufacturing method for semiconductor device
TOKYO ELECTRON LTD0 citations60
US10008564B2Jun 26, 2018
Method of corner rounding and trimming of nanowires by microwave plasma
TOKYO ELECTRON LTD0 citations50
US9418837B2Aug 16, 2016
Semiconductor device manufacturing method and substrate treatment system
TOKYO ELECTRON LTD0 citations49
US12598926B2Apr 7, 2026
Method of forming conductive member and method of forming channel
TOKYO ELECTRON LTD0 citations44