Inventor
FUJII TSUNEO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “FUJII TSUNEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAIKIN IND LTD
7 patentsUS4725375AFeb 16, 1988
Etchant composition
DAIKIN IND LTD38 citations91
US4686168AAug 11, 1987
Fluoroalkyl acrylate resist material and process for forming fine resist pattern
DAIKIN IND LTD27 citations91
US4539250ASep 3, 1985
Resist material and process for forming fine resist pattern
DAIKIN IND LTD17 citations81
US4421843ADec 20, 1983
Process for forming film of fluoroalkyl acrylate polymer on substrate and process for preparing patterned resist from the film
DAIKIN IND LTD24 citations81
US4382985AMay 10, 1983
Process for forming film of fluoroalkyl acrylate polymer on substrate and process for preparing patterned resist from the film
DAIKIN IND LTD24 citations81
US4421842ADec 20, 1983
Process for forming film of fluoroalkyl acrylate polymer on substrate and process for preparing patterned resist from the film
DAIKIN IND LTD3 citations61
US4656108AApr 7, 1987
Patterned film of thiocarbonyl fluoride polymer
DAIKIN IND LTD0 citations48