Inventor
GALBRAITH LEE K
US9 patents
⚠️ This page may combine multiple inventors who share the name “GALBRAITH LEE K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TENCOR INSTRUMENTS
8 patentsUS4378159AMar 29, 1983
Scanning contaminant and defect detector
TENCOR INSTRUMENTS229 citations98
US5604585AFeb 18, 1997
Particle detection system employing a subsystem for collecting scattered light from the particles
TENCOR INSTRUMENTS106 citations97
US4601576AJul 22, 1986
Light collector for optical contaminant and flaw detector
TENCOR INSTRUMENTS134 citations96
US5276498AJan 4, 1994
Adaptive spatial filter for surface inspection
TENCOR INSTRUMENTS70 citations95
US5168386ADec 1, 1992
Flat field telecentric scanner
TENCOR INSTRUMENTS74 citations95
US4898471AFeb 6, 1990
Particle detection on patterned wafers and the like
TENCOR INSTRUMENTS295 citations95
US4597665AJul 1, 1986
Dual collector optical flaw detector
TENCOR INSTRUMENTS70 citations95
US4512659AApr 23, 1985
Apparatus for calibrating a surface scanner
TENCOR INSTRUMENTS25 citations81