Inventor
TANIGAWA MAKOTO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “TANIGAWA MAKOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHARP KK
7 patentsUS5480047AJan 2, 1996
Method for forming a fine resist pattern
SHARP KK153 citations97
US5303199AApr 12, 1994
Redundant memory device having a memory cell and electrically breakable circuit having the same dielectric film
SHARP KK54 citations95
US5108783AApr 28, 1992
Process for producing semiconductor devices
SHARP KK66 citations95
US5397734AMar 14, 1995
Method of fabricating a semiconductor device having a triple well structure
SHARP KK46 citations92
US5353116AOct 4, 1994
Defect inspection system for phase shift masks
SHARP KK12 citations73
US5330862AJul 19, 1994
Method for forming resist mask pattern by light exposure having a phase shifter pattern comprising convex forms in the resist
SHARP KK17 citations73
US5328871AJul 12, 1994
Manufacturing process for semiconductor device
SHARP KK17 citations66