P

Inventor

NAKADA TSUTOMU

JP40 patents
⚠️ This page may combine multiple inventors who share the name “NAKADA TSUTOMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

20 patents
US6488774B1Dec 3, 2002

Trap apparatus

EBARA CORP378 citations99
US6282368B1Aug 28, 2001

Liquid feed vaporization system and gas injection device

EBARA CORP104 citations99
US6132512AOct 17, 2000

Vapor-phase film growth apparatus and gas ejection head

EBARA CORP225 citations99
US5951923ASep 14, 1999

Vaporizer apparatus and film deposition apparatus therewith

EBARA CORP275 citations99
US6387182B1May 14, 2002

Apparatus and method for processing substrate

EBARA CORP113 citations97
US6195504B1Feb 27, 2001

Liquid feed vaporization system and gas injection device

EBARA CORP58 citations96
US6269221B1Jul 31, 2001

Liquid feed vaporization system and gas injection device

EBARA CORP16 citations92
US5950646ASep 14, 1999

Vapor feed supply system

EBARA CORP23 citations92
US8029653B2Oct 4, 2011

Electroplating apparatus and electroplating method

EBARA CORP13 citations83
US6312569B1Nov 6, 2001

Chemical vapor deposition apparatus and cleaning method thereof

EBARA CORP11 citations73
US10513795B2Dec 24, 2019

Plating apparatus, plating method, and substrate holder

EBARA CORP1 citations61
US10316426B2Jun 11, 2019

Plating apparatus, plating method, and substrate holder

EBARA CORP1 citations61
US9293364B2Mar 22, 2016

Electroless plating apparatus and electroless plating method

EBARA CORP2 citations61
US8012330B2Sep 6, 2011

Plating method and plating apparatus

EBARA CORP1 citations52
US10914019B2Feb 9, 2021

Plating apparatus and plating method

EBARA CORP0 citations51
US10968530B2Apr 6, 2021

Electroplating device

EBARA CORP0 citations50
US8357284B2Jan 22, 2013

Method for forming metal film

EBARA CORP0 citations50
US9708724B2Jul 18, 2017

Anode unit and plating apparatus having such anode unit

EBARA CORP1 citations49
US11773504B2Oct 3, 2023

Plating support system, plating support device, and recording medium

EBARA CORP0 citations48
US7947156B2May 24, 2011

Substrate processing apparatus and substrate processing method

EBARA CORP0 citations41

YAMAHA CORP

5 patents

UNIV CALIFORNIA

3 patents

NIPPON ALEPH

3 patents

UNIV NIIGATA

2 patents

JAPAN SCIENCE & TECH CORP

1 patent

GE MED SYS GLOBAL TECH CO LLC

1 patent

NISSAN MOTOR

1 patent

NAKADA TSUTOMU

1 patent

TAKAHASHI TAKASHI

1 patent

TATEISHI HIDEKI

1 patent

KURASHINA KEIICHI

1 patent