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Inventor
PETERSEN CARL T
US
5 patents
⚠️ This page may combine multiple inventors who share the name “PETERSEN CARL T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
WHITE JOHN M
1 patent
US5352294A
Oct 4, 1994
Alignment of a shadow frame and large flat substrates on a support
WHITE JOHN M
148 citations
98
APPLIED MATERIALS INC
1 patent
US5611865A
Mar 18, 1997
Alignment of a shadow frame and large flat substrates on a heated support
APPLIED MATERIALS INC
116 citations
97
RAYCOM TECHNOLOGIES INC
1 patent
US6488824B1
Dec 3, 2002
Sputtering apparatus and process for high rate coatings
RAYCOM TECHNOLOGIES INC
255 citations
95
INTEVAC INC
1 patent
US5873989A
Feb 23, 1999
Methods and apparatus for linear scan magnetron sputtering
INTEVAC INC
69 citations
94
ETEC CORP
1 patent
US3958124A
May 18, 1976
Method and apparatus for sem specimen coating and transfer
ETEC CORP
19 citations
68