Inventor
MEISBURGER DAN
US5 patents
⚠️ This page may combine multiple inventors who share the name “MEISBURGER DAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA INSTR CORP
3 patentsUS5717204AFeb 10, 1998
Inspecting optical masks with electron beam microscopy
KLA INSTR CORP148 citations98
US5665968ASep 9, 1997
Inspecting optical masks with electron beam microscopy
KLA INSTR CORP120 citations97
US5502306AMar 26, 1996
Electron beam inspection system and method
KLA INSTR CORP400 citations95