Inventor

DESAI ANIL

US2 patents

⚠️ This page may combine multiple inventors who share the name “DESAI ANIL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA INSTR CORP

1 patent

US5502306AMar 26, 1996

Electron beam inspection system and method

KLA INSTR CORP400 citations95

HERMES MICROVISION TAIWAN INC

1 patent

US6791095B2Sep 14, 2004

Method and system of using a scanning electron microscope in semiconductor wafer inspection with Z-stage focus

HERMES MICROVISION TAIWAN INC10 citations70