Inventor

VENEKLASEN LEE

US9 patents

⚠️ This page may combine multiple inventors who share the name “VENEKLASEN LEE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents

US6720565B2Apr 13, 2004

Real-time prediction of and correction of proximity resist heating in raster scan particle beam lithography

APPLIED MATERIALS INC60 citations94

US6373071B1Apr 16, 2002

Real-time prediction of proximity resist heating and correction of raster scan electron beam lithography

APPLIED MATERIALS INC32 citations91

US6563124B2May 13, 2003

Electron beam apparatus having traversing circuit boards

APPLIED MATERIALS INC17 citations81

KLA TENCOR

1 patent

US6586733B1Jul 1, 2003

Apparatus and methods for secondary electron emission microscope with dual beam

KLA TENCOR46 citations96

KLA INSTR CORP

1 patent

US5502306AMar 26, 1996

Electron beam inspection system and method

KLA INSTR CORP400 citations95

ETEC SYSTEMS INC

1 patent

US5784925AJul 28, 1998

Vacuum compatible linear motion device

ETEC SYSTEMS INC35 citations92

KLA TENCOR CORP

1 patent

US6610980B2Aug 26, 2003

Apparatus for inspection of semiconductor wafers and masks using a low energy electron microscope with two illuminating beams

KLA TENCOR CORP42 citations90

KLA TENCOR TECH CORP

1 patent

US6803572B2Oct 12, 2004

Apparatus and methods for secondary electron emission microscope with dual beam

KLA TENCOR TECH CORP13 citations84

PERKIN ELMER CORP

1 patent

US4788431ANov 29, 1988

Specimen distance measuring system

PERKIN ELMER CORP21 citations80