Inventor

KIRK CHRIS

GB3 patents

⚠️ This page may combine multiple inventors who share the name “KIRK CHRIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA INSTR CORP

1 patent

US5502306AMar 26, 1996

Electron beam inspection system and method

KLA INSTR CORP400 citations95

KLA TENCOR TECH CORP

1 patent

US7705331B1Apr 27, 2010

Methods and systems for providing illumination of a specimen for a process performed on the specimen

KLA TENCOR TECH CORP157 citations94

KLA TENCOR CORP

1 patent

US9927371B2Mar 27, 2018

Confocal line inspection optical system

KLA TENCOR CORP0 citations33