P

Inventor

MUNRO ERIC

GB9 patents
⚠️ This page may combine multiple inventors who share the name “MUNRO ERIC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR TECH CORP

3 patents
US7141791B2Nov 28, 2006

Apparatus and method for E-beam dark field imaging

KLA TENCOR TECH CORP53 citations94
US7164139B1Jan 16, 2007

Wien filter with reduced chromatic aberration

KLA TENCOR TECH CORP26 citations90
US7217924B1May 15, 2007

Holey mirror arrangement for dual-energy e-beam inspector

KLA TENCOR TECH CORP15 citations83

KLA INSTR CORP

2 patents
US5578821ANov 26, 1996

Electron beam inspection system and method

KLA INSTR CORP421 citations95
US5502306AMar 26, 1996

Electron beam inspection system and method

KLA INSTR CORP400 citations95

AGERE SYSTEMS INC

2 patents
US6440620B1Aug 27, 2002

Electron beam lithography focusing through spherical aberration introduction

AGERE SYSTEMS INC11 citations70
US6620565B2Sep 16, 2003

Electron beam lithography apparatus focused through spherical aberration introduction

AGERE SYSTEMS INC0 citations48

JEOL LTD

1 patent
US6441378B1Aug 27, 2002

Magnetic energy filter

JEOL LTD6 citations60

AGERE SYST GUARDIAN CORP

1 patent
US6420714B1Jul 16, 2002

Electron beam imaging apparatus

AGERE SYST GUARDIAN CORP5 citations59