Inventor

BURG MICHAEL S

US3 patents

Patents

3 patents

US6133670AOct 17, 2000

Compact electrostatic comb actuator

SANDIA CORP173 citations97

US6211599B1Apr 3, 2001

Microelectromechanical ratcheting apparatus

SANDIA CORP99 citations96

US6313562B1Nov 6, 2001

Microelectromechanical ratcheting apparatus

SANDIA CORP71 citations94