Inventor
AU KEN
US4 patents
Patents
4 patentsUS6063666AMay 16, 2000
RTCVD oxide and N2 O anneal for top oxide of ONO film
ADVANCED MICRO DEVICES INC127 citations96
US6140246AOct 31, 2000
In-situ P doped amorphous silicon by NH3 to form oxidation resistant and finer grain floating gates
ADVANCED MICRO DEVICES INC7 citations72
US6281078B1Aug 28, 2001
Manufacturing process to eliminate ONO fence material in high density NAND-type flash memory devices
ADVANCED MICRO DEVICES INC6 citations61
US5994239ANov 30, 1999
Manufacturing process to eliminate polystringers in high density nand-type flash memory devices
ADVANCED MICRO DEVICES INC1 citations51