Inventor
SOGARD MICHAEL R
US34 patents
⚠️ This page may combine multiple inventors who share the name “SOGARD MICHAEL R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
25 patentsUS6014200AJan 11, 2000
High throughput electron beam lithography system
NIKON CORP169 citations99
US6376329B1Apr 23, 2002
Semiconductor wafer alignment using backside illumination
NIKON CORP69 citations96
US7875864B2Jan 25, 2011
Devices and methods for thermophoretic and electrophoretic reduction of particulate contamination of lithographic reticles and other objects
NIKON CORP21 citations92
US7477358B2Jan 13, 2009
EUV reticle handling system and method
NIKON CORP16 citations92
US7367138B2May 6, 2008
Devices and methods for thermophoretic and electrophoretic reduction of particulate contamination of lithographic reticles
NIKON CORP24 citations92
US6864601B2Mar 8, 2005
Electric motors with reduced stray magnetic fields
NIKON CORP27 citations92
US5954982ASep 21, 1999
Method and apparatus for efficiently heating semiconductor wafers or reticles
NIKON CORP32 citations92
US5870197AFeb 9, 1999
Precision stage interferometer system with local single air duct
NIKON CORP23 citations92
US5784166AJul 21, 1998
Position resolution of an interferometrially controlled moving stage by regression analysis
NIKON CORP33 citations92
US6126169AOct 3, 2000
Air bearing operable in a vacuum region
NIKON CORP34 citations91
US6770987B1Aug 3, 2004
Brushless electric motors with reduced stray AC magnetic fields
NIKON CORP26 citations90
US7598508B2Oct 6, 2009
Gaseous extreme-ultraviolet spectral purity filters and optical systems comprising same
NIKON CORP12 citations84
US6529260B2Mar 4, 2003
Lifting support assembly for an exposure apparatus
NIKON CORP17 citations84
US7804583B2Sep 28, 2010
EUV reticle handling system and method
NIKON CORP6 citations74
US6455956B1Sep 24, 2002
Two-dimensional electric motor
NIKON CORP7 citations74
US6402380B1Jun 11, 2002
Fluid bearing operable in a vacuum region
NIKON CORP8 citations74
US6302585B1Oct 16, 2001
Two Axis stage with arcuate surface bearings
NIKON CORP12 citations74
US6287004B1Sep 11, 2001
Fluid bearing operable in a vacuum region
NIKON CORP7 citations74
US7709813B2May 4, 2010
Incidence surfaces and optical windows that are solvophobic to immersion liquids
NIKON CORP6 citations63
US7554648B2Jun 30, 2009
Blind devices and methods for providing continuous thermophoretic protection of lithographic reticle
NIKON CORP4 citations63
US6903346B2Jun 7, 2005
Stage assembly having a follower assembly
NIKON CORP6 citations62
US6794657B2Sep 21, 2004
Magnetic shunt assembly for an exposure apparatus
NIKON CORP0 citations52
US6132091AOct 17, 2000
X-Y stage with arcuate surface bearings
NIKON CORP1 citations52
US7876452B2Jan 25, 2011
Interferometric position-measuring devices and methods
NIKON CORP0 citations41
US9529282B2Dec 27, 2016
Position-measurement systems
NIKON CORP0 citations39
NIKON PRECISION INC
4 patentsUS5866935AFeb 2, 1999
Tunneling device
NIKON PRECISION INC44 citations96
US5631731AMay 20, 1997
Method and apparatus for aerial image analyzer
NIKON PRECISION INC79 citations96
US5552888ASep 3, 1996
Apparatus for measuring position of an X-Y stage
NIKON PRECISION INC66 citations96
US5602619AFeb 11, 1997
Scanner for step and scan lithography system
NIKON PRECISION INC17 citations74
SOGARD MICHAEL R
4 patentsUS8767174B2Jul 1, 2014
Temperature-controlled holding devices for planar articles
SOGARD MICHAEL R4 citations71
US10054754B2Aug 21, 2018
Thermal regulation of vibration-sensitive objects with conduit circuit having liquid metal, pump, and heat exchanger
SOGARD MICHAEL R1 citations51
US8717542B2May 6, 2014
Fluid gauge with multiple reference gaps
SOGARD MICHAEL R0 citations51
US8593779B2Nov 26, 2013
Hybrid electrostatic chuck
SOGARD MICHAEL R1 citations51