Inventor

SHINOZAKI KENYA

JP3 patents

⚠️ This page may combine multiple inventors who share the name “SHINOZAKI KENYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US7905195B2Mar 15, 2011

Floating-type substrate conveying and processing apparatus

TOKYO ELECTRON LTD34 citations91

TOSHIBA MACHINE CO LTD

1 patent

US6641671B2Nov 4, 2003

Coating apparatus for applying coating material intermittently to substrate

TOSHIBA MACHINE CO LTD11 citations71

INAMASU TOSHIFUMI

1 patent

US8307778B2Nov 13, 2012

Coating method and coating unit

INAMASU TOSHIFUMI5 citations53