Inventor
DAMS JOHANNES ADRIANUS ANTONIU
NL11 patents
Patents
11 patentsUS7084956B2Aug 1, 2006
Supporting device, lithographic apparatus, and device manufacturing method employing a supporting device, and a position control system arranged for use in a supporting device
ASML NETHERLANDS BV17 citations83
US7385678B2Jun 10, 2008
Positioning device and lithographic apparatus
ASML NETHERLANDS BV10 citations82
US7126666B2Oct 24, 2006
Lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV12 citations81
US7307689B2Dec 11, 2007
Lithographic apparatus, reticle masking device for a lithographic apparatus, gas bearing and apparatus comprising such gas bearing
ASML NETHERLANDS BV10 citations78
US7184123B2Feb 27, 2007
Lithographic optical system
ASML NETHERLANDS BV8 citations66
US7385679B2Jun 10, 2008
Lithographic apparatus and actuator
ASML NETHERLANDS BV4 citations61
US7259832B2Aug 21, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations61
US7061587B2Jun 13, 2006
Control system, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV2 citations61
US6885117B2Apr 26, 2005
Magnetic actuator under piezoelectric control
ASML NETHERLANDS BV2 citations60
US7145634B2Dec 5, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations58
US7280182B2Oct 9, 2007
Lithographic apparatus, device manufacturing method and computer program
ASML NETHERLANDS BV0 citations39