Inventor
RUTT PAUL M
US6 patents
Patents
6 patentsUS7207224B2Apr 24, 2007
Wide-range combination vacuum gauge
BROOKS AUTOMATION INC37 citations90
US7030619B2Apr 18, 2006
Ionization gauge
BROOKS AUTOMATION INC15 citations82
US7313966B2Jan 1, 2008
Method and apparatus for storing vacuum gauge calibration parameters and measurement data on a vacuum gauge structure
BROOKS AUTOMATION INC2 citations61
US7295015B2Nov 13, 2007
Ionization gauge
BROOKS AUTOMATION INC5 citations60
US7921719B2Apr 12, 2011
Method and apparatus for storing vacuum gauge calibration parameters and measurement data on a vacuum gauge structure
BROOKS AUTOMATION INC1 citations50
US7418869B2Sep 2, 2008
Wide-range combination vacuum gauge
BROOKS AUTOMATION INC1 citations50