Inventor
LEITH ALLEN JOHN
US7 patents
⚠️ This page may combine multiple inventors who share the name “LEITH ALLEN JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS7205187B2Apr 17, 2007
Micro-feature fill process and apparatus using hexachlorodisilane or other chlorine-containing silicon precursor
TOKYO ELECTRON LTD60 citations97
US7468311B2Dec 23, 2008
Deposition of silicon-containing films from hexachlorodisilane
TOKYO ELECTRON LTD17 citations83
US7501349B2Mar 10, 2009
Sequential oxide removal using fluorine and hydrogen
TOKYO ELECTRON LTD5 citations62
US7358194B2Apr 15, 2008
Sequential deposition process for forming Si-containing films
TOKYO ELECTRON LTD5 citations62
US7524769B2Apr 28, 2009
Method and system for removing an oxide from a substrate
TOKYO ELECTRON LTD0 citations51
US7405140B2Jul 29, 2008
Low temperature formation of patterned epitaxial Si containing films
TOKYO ELECTRON LTD1 citations51